Nanoimprint Lithography
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Introduction
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| Nanoimprint lithography (NIL) has emerged as a viable next
generation lithography (NGL) capable of transferring physical
patterns smaller than 5 nm into a polymeric film. The production
of nanoscale structures enabled by NIL raises new metrology
challenges, as the ability to pattern now exceeds the ability
to measure and/or evaluate material properties. The objective
of this project is to develop high- resolution metrologies that
facilitate the development of NIL. |
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| Examples of NIL pattern resolution |
Objective
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| 1. Short term |
| Develop CD-SAXS as a high resolution shape metrology
to assess the fidelity of pattern transfer between the mold
and imprint for NIL processes and materials |
| 2. Long term |
| Develop supporting mechanical and physical property metrologies,
that when coupled with highly accurate CD-SAXS shape measurements,
facilitate the fabrication & optimization of functional
nanoscale imprinted devices ->Accurate shape and property
measurements in nanostructures <- |
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NIST Role
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Understand the materials, interface, and confinement limitations
to pattern resolution in nanoimprint processes
Develop new mechanical and physical property measurements
for imprinted polymeric nanostructures
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Highlights
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| Demonstrate Fidelity of Pattern Transfer Concept
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| Sample Rotation for 3-D Line Shape |
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| Thermal Stability of Imprinted Nanostructures
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Customers and Impact
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| • NIL technique receiving world-wide attention |
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| Nano-imprint lithography is slated for the 32-nm node (2009)
on the ITRS roadmap |
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| 10 Emerging Technologies That Will Change the World |
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• Molecular Imprints & Nanonex on Silicon Strategies
“60 Emerging Start-Ups” list for 2004
• Invited Nanoimprint Lecture at MRS Fall 2004 “Innovations
for Sub-100 nm Patterning” session
• Active collaboration from several industrial and academic
leaders in NIL technology
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NIST Contributors
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Christopher Soles*
Ronald Jones
Tengjiao Hu
Wen-li Wu
Eric Lin
Stephanie Hooker
Colm Flannery |
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Collaborators:
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Diego Casa (1)
Rainer Kolb (2)
Alexei Sokolov (3)
Stella Pang (4)
Ron Reano (4)
C. Grant Willson (5)
Steve Johnson (5)
Martha Sanchez (6)
Larry Koecher (7)
Doug Resnick (8)
Kevin Nordquist (8)
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