Polymers Main Page > Publications > Detail    Line Edge Roughness Characterization Of Sub-50Nm Structures Using Cd-Saxs: Round-Robin Benchmark Results     Author:     Wang, Chengqing, Jones, Ronald L., Lin, Eric K., Wu, Wen-li, Villarrubia, John S., Choi, Kwang-woo, Clarke, James S., Rice, Bryan J., Leeson, Michael, Roberts, Jeanette, Bristol, Robert, and Bunday, Ben   Year:        2007   Subject Terms: Scattering   Citation:   SPIE conference, San Jose, CA.   Group: Electronics Materials                 To download Acrobat Reader, please visit Adobe website           NIST Materials Science & Engineering Laboratory - Polymers Division