Polymer division banner Polymer division home page Research areas link Research projects link Research facilities link Staff contact link Search link NIST link Polymer division home page Materials Science and Engineering Laboratory  
 
 

Small Angle X-ray Scattering (SAXS)
 
Small Angle X-ray Scattering (SAXS) is a powerful non-destructive technique to probe the structure of materials over length scales of (1 to 100) nm. The SAXS facility in the Division is unique with several configurations available through two target sources, a Bonse-Hart camera, and a pinhole geometry. The Molybdenum target allows SAXS measurements of thin films on silicon films enabling a wide range of thin film structural measurements.
 

Details:
  • CD-SAXS: Critical-Dimension Small-Angle X-ray Scattering
  • USAXS: Ultra Small-Angle X-ray Scattering
  • Source: High frequency, rotating anode x-ray generator
  • Target: Copper (Cu) or Molydenum (Mo)
  • Geometry: Pinhole for Cu radiation (SAXS); Bonse-Hart and pinhole for Mo radiation (USAXS and SAXS, respectively)
  • Detector: 2-D wire detector for Cu radiation (SAXS); 2-D image plate (SAXS) and 1-D Bonse-Hart camera (USAXS) for Mo radiation
    		•
     
     

    SAXS Copper Source Configuration
  • l= 1.54 Å (7.8 keV);Dl/l=10-3
  • PH1 = 400 mm; PH2 = 200 mm; PH2 = 700mm
  • SSD = 140 cm; SDD = 82 cm or 150 cm
  • Q Range = 0.006 Å-1 - 0.300 Å-1
  • Beam Stop = 0.4 cm in diameter
  • Beam Size on the Sample = 0.1 cm in diameter
  • Beam Intensity on the Sample = 2,000,000 Counts/s
  • 2-D Wire Detector: 12.5 cm x 12.5 cm; 1,024 pixels x 1,024 pixels
    		•  SAXS Geometry
    Photo of SAXS Mo Configuration SAXS pattern of 60nm Nanoimprint Mold
    SAXS Copper Source Configuration SAXS-Cu Pattern of 60nm Nanoimprint Mold
     
     

    SAXS Molybdenum Source Configuration
  • l= 0.71 Å (17 keV);Dl/l=10-4
  • PH1 = 500 mm; PH2 = 500 mm; PH2 = 850mm
  • SSD = 140 cm; SDD = 50, 85, 105, 205 or 305 cm
  • Q Range = 0.02 Å-1 - 2.00 Å-1
  • Beam Stop = 1.0 cm in diameter
  • Beam Size on the Sample = 0.1 cm in diameter
  • Beam Intensity on the Sample >>700,000 Counts/s
  • 2-D Image Plate: 30.0 cm x 30.0 cm; 1,500 pixels x 1,500 pixels
    		•  SAXS Geometry
    Photo of SAXS Mo Configuration SAXS pattern of lines with copper seeds
    SAXS Molybdenum Source Configuration SAXS-Mo Pattern of Lines with Copper Seeds
     
     

    USAXS Molybdenum Source Configuration
  • l= 0.71 Å (17 keV);Dl/l=10-4
  • 2Q Range = 0° - 1.5°
  • Q Range = 3x10-4 Å-1 - 0.23 Å-1
  • Beam Size on the Sample = 0.5 mm diameter
  • Beam Intensity on the Sample = 700,000 Counts/s
    		•  USAXS Molybdenum Geometry
    Photo of USAXS Molybdenum setup USAXS image of lines with copper seeds
    USAXS Molybdenum Setup USAXS Data on Lines with Copper Seeds
     
     

    Contact Information
     

    Derek L. Ho
    Email: derek.ho@nist.gov
     

    Eric K. Lin
    Email: eric.lin@nist.gov
     
    NIST Materials Science & Engineering Laboratory - Polymers Division
    		  line
     
     
    Research Facilities
       
    bullet Small Angle X-ray Scattering
       
    bullet X-Ray Reflectivity
       
    bullet Neutron Reflectivity
       
    bullet Small Angle Neutron Scattering
       
    bullet Macromolecular Mass Spectrometry
       
    bullet Fiber-Matrix Interface Strength
       
    bullet Combinatorial Methods
       
    bullet Optical Coherence Tomography
       
    bullet Extrusion Visualization
       
    bullet Mercury Dilatometer
       
     
     
     
    		 
    line